Investigation of lead layers by means of SEM-XRF.
Micro-XRF within an Electron Microscope (SEM) has developed into a powerful technique for material analysis. In this AppNote we discuss the analysis of a sample by elemental mapping of layers using an IXRF Systems’ SEM/EDS and SEM-XRF mounted on a Hitachi SEM. Illustrated is the power of Iridium Ultra software that combines both e-beam and X-ray source modalities.