Elemental microanalysis with high accuracy and high precision by SEM/EDS
“SEM/SDD-EDS has reached a level of performance that challenges EPMA/WDS, which is regarded as the “gold standard” of electron-excited X-ray microanalysis, for accuracy and precision even when severe peak interference occurs. Accuracy within ±5 % relative can be routinely achieved for major constituents (mass concentration C > 0.1), even the low atomic number elements, ±10 % relative for minor constituents (0.01 ≤ C ≤ 0.1), and ±25 % relative for trace constituents from 0.001 to 0.01 mass fraction. Limits of detection as low as 0.0005 mass fraction can be achieved for most elements, even when severe peak interference occurs. Remarkably, SEM/SDD-EDS can achieve a given level of precision with a substantially lower dose, by a factor of 10–100, compared to EPMA/WDS, which is a critical issue when beam damage occurs.”
Newbury*, D.E., Ritchie*, N.W.M. Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS). J Mater Sci 50, 493–518 (2015). https://doi.org/10.1007/s10853-014-8685-2
* Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD, 20899, USA
